Beschreibung
InhaltsangabeFabrication.- The substrate and adding material to it.- Creating and transferring patterns—Photolithography.- Creating structures—Micromachining.- Solid mechanics.- Applications.- Thinking about modeling.- MEMS transducers—An overview of how they work.- Piezoresistive transducers.- Capacitive transducers.- Piezoelectric transducers.- Thermal transducers.- to microfluidics.- Laboratories.- Microfabrication laboratories.
Autorenportrait
InhaltsangabeFabrication.- The substrate and adding material to it.- Creating and transferring patterns—Photolithography.- Creating structures—Micromachining.- Solid mechanics.- Applications.- Thinking about modeling.- MEMS transducers—An overview of how they work.- Piezoresistive transducers.- Capacitive transducers.- Piezoelectric transducers.- Thermal transducers.- to microfluidics.- Laboratories.- Microfabrication laboratories.
