0

Multi-Wafer Rotating MEMS Machines

Turbines, Generators, and Engines, MEMS Reference Shelf

Erschienen am 03.03.2012, 1. Auflage 2014
160,49 €
(inkl. MwSt.)

Lieferbar innerhalb 1 - 2 Wochen

In den Warenkorb
Bibliografische Daten
ISBN/EAN: 9781461424598
Sprache: Englisch
Umfang: xvi, 456 S., 302 s/w Illustr., 456 p. 302 illus.
Einband: kartoniertes Buch

Beschreibung

Inhaltsangabeto PowerMEMS.- System Design Considerations and Device Overview.- Materials, Structures and Packaging.- Microengine Fabrication.- Fabrication of Microscale Rotating Magnetic Machines.- High-Speed Gas Bearings for Micro-Turbomachinery.- Thermofluidics and Turbomachinery.- Motors and Generators.- Microcombustors for Rotating Machinery.

Autorenportrait

InhaltsangabeIntroduction to PowerMEMS.- System design considerations and device overview.- Materials, structures, and packaging.- Microengine fabrication.- Fabrication of microscale rotating magnetic machines.- High-speed gas bearings for micro-turbomachinery.- Thermofluids and turbomachinery.- Motors and generators.- Microcombustors for rotating machinery.